The coating is ideally suited for bulk-micromachined devices or surface
micromachined devices obtained from dry etch-release. This coating is
stable to as high as 400 oC in air.
Coating 2: the coating is designed for MEMS devices obtained
from aqueous HF etching. The coating possesses similarly thermal stability
as coating 1.
Coating 3: the coating is ideally suited for silicon based MEMS
devices from surface micromachining obtained from aqueous HF release
etch. It is optimized for exceptionally low surface energy (H2O contact
angle 110 - 125 degrees) and low friction coefficient (~0.01).
How to do business with MicroSurfaces:
1) Coating services: you send us unfinished MEMS products (e.g., at the die level or before packaging). We will provide the critical anti-stiction and anti-drift coatings and send the coated devices back to you for the completion of your manufacturing process. Cost of the service will depend on both time and volume.
2) License: We will license our coating technology and/or supply
coating equipment to the customer and assist the customer in implementing
the technology. We will continue to work with the licensee to monitor
any coating issue and make future coating technology from MSI available
to the licensee.